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Services for IVS Metrology Systems

The best value in metrology


IVS OEM System Support

Inspectrology provides complete system support for all IVS Metrology systems, including IVS System Training, Service Contracts, Preventative Maintenance services and Emergency Service.

The team who trained the original IVS factory engineers provides all of our expert support. We were there at the beginning when IVS was founded in 1980 from a project at MIT Lincoln Laboratory to design image processing systems for advanced research applications.

The focus of the company quickly turned to CD and Overlay Metrology Systems for the Semiconductor Industry and in 1985 the first automated system was delivered to Motorola as the ACV3. From there, IVS grew to become a dominant force in optical CD and Overlay metrology systems.

In 1997 IVS was purchased by Schlumberger and spun off as Soluris in 2003. In the spring of 2006, Soluris was purchased by Nanometrics.

Inspectrology was formed in 2008 by IVS engineers devoted to the advancement of the IVS metrology platform, focusing on the 75mm-200mm wafer based market. Inspectrology is now the #1 supplier of refurbished IVS metrology systems and a top tier service supplier for the metrology industry.


System Training for IVS Metrology Systems

With decades of experience creating, maintaining and using the IVS product line, Inspectrology provides the absolute best training available for your IVS systems.

Our IVS Optical System Process Training Class for Semiconductor Users is an intensive three day training session that gives the student a basic understanding of Optical Metrology and the ability to create and maintain a series of job plans to support their fabrication processes.  This class also provides a section on system monitoring along with an introduction to the various subsystems and basic troubleshooting techniques.

We also offer an IVS Optical System Basic Maintenance Course and our IVS Optical System Advanced Maintenance Course.

These outstanding metrology classes, taught by IVS Metrology System experts, may be taken at our clean room facility in Sudbury, MA or at your location. Any of these metrology classes can also be customized to your specific needs.

Preventative Maintenance Services

Preventative Maintenance, with the emphasis on preventative, is always the best kind of maintenance. Our comprehensive preventative maintenance services not only ensure long life for your IVS Metrology Tool, but also can restore IVS tool to factory specifications. In addition, we will use our expertise to ensure that multiple IVS tools are well matched for optimum performance.

Preventive Maintenance (PM) Services on IVS products are recommended on a quarterly basis. Inspectrology offers a choice of two comprehensive Preventive Maintenance contract plans. We also provide PM on a non-contract basis.

Preventive Maintenance Services are available for all IVS Metrology Tool models including IVS 200, IVS 185, IVS 165, IVS 155, IVS 135, IVS 130, IVS 120, IVS 100.
Service Contracts, Customer Support Options

Inspectrology offers several Service Contracts for your IVS Metrology Systems. These range all the way up to our full service support programs that are designed to completely cover your IVS Systems and ensure optimal system performance. All of our programs are backed by our comprehensive knowledge of, and experience with, the entire IVS Metrology System line.

Our Full System Service Contract offers complete system coverage for one year including unlimited system repair, quarterly PM services, a week of on-site expert applications support and next business day response with callback within two hours. We can also customize any of our support contracts to your requirements.

Contact us today for more information on our outstanding Full Service Support and Preventative Maintenance programs.

Need emergency service for any of your IVS systems?
We provide emergency service and parts exchange at reasonable prices.

Call us at 978.212.3100. Email

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