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News Releases from Inspectrology


Onto Innovation Adds Overlay Metrology Capability with the Acquisition of Inspectrology, LLC

. Expands position in the high growth compound semiconductor market driven by higher content in 5G RF and electric vehiclesrnrn. Onto Innovation’s Advanced Process Control (APC) software and Dragonfly® System are expected to provide revenue synergies when combined with Inspectrology products

WILMINGTON, Mass.--(BUSINESS WIRE)-- Onto Innovation Inc. (NYSE: ONTO) today announced that it has acquired Inspectrology, LLC. Headquartered in Sudbury, Massachusetts, USA, Inspectrology is a leading supplier of overlay metrology for controlling lithography and etch processes in the compound semiconductor market.

“This is a nice strategic fit for Onto Innovation’s portfolio of solutions for the high growth specialty and advanced packaging segment. We see revenue synergies by leveraging our broader access to global markets, especially in Asia, where Onto Innovation has built a broad infrastructure to support our leading position in inspection for this segment. In addition, we see revenue synergies when combined with Onto Innovation’s inspection and software technologies. By combining these technologies, we will offer a more comprehensive process control solution for the lithography cell in the rapidly expanding compound semiconductor market,” said Mike Plisinski, Onto Innovation’s chief executive officer.

Dr. Ju Jin, vice president and general manager of Onto Innovation’s inspection business said, “We see several growth drivers for the compound semiconductor and specialty semiconductor markets in 2021 and beyond. The rapidly expanding 5G wireless technology, spanning from smartphones and IoT to network equipment and base stations, is increasing the demand for compound semiconductor chips such as power amplifiers, RF filters, and mmWave cells. In addition, hybrid and electric vehicles, chargers, photovoltaic and wind power generators are driving the fast adoption of compound semiconductor power devices.

“Based on industry forecasts, the gallium nitride and silicon carbide power device market is forecasted to grow at a 25% CAGR from 2020 to 2025. By leveraging our advanced process control software (APC) and the Inspectrology systems we will be able to directly improve the overlay performance and yield for the lithography cells in this rapidly growing market.”

Paul Knutrud, Inspectrology’s chief financial officer and vice president said, “We are joining Onto Innovation based on the strong cultural fit and synergies between our customers and technologies. As a leading supplier for overlay and CD metrology systems to the compound semiconductor, RF, MEMS, and LED markets, the Inspectrology and the Onto teams are a perfect fit. Onto Innovation is providing inspection and software solutions to our same customers, and together, we will offer a more comprehensive solution for process control. We will now be able to leverage Onto Innovation’s R&D resources and larger customer support organization to better serve our customers.”

The experienced Inspectrology leadership team has supplied optical metrology overlay technology to these customers since 1983. The purchase price represents 1.4x Inspectrology’s 2020 revenue of approximately $20 million. The acquisition and associated transaction expenses are being funded from Onto Innovation’s cash on hand. Other terms of transaction were not disclosed.

About Onto Innovation Inc.

Onto Innovation is a leader in process control, combining global scale with an expanded portfolio of leading-edge technologies that include: Un-patterned wafer quality; 3D metrology spanning chip features from nanometer scale transistors to large die interconnects; macro defect inspection of wafers and packages; metal interconnect composition; factory analytics; and lithography for advanced semiconductor packaging. Our breadth of offerings across the entire semiconductor value chain helps our customers solve their most difficult yield, device performance, quality, and reliability issues. Onto Innovation strives to optimize customers’ critical path of progress by making them smarter, faster and more efficient. Headquartered in Wilmington, Massachusetts, Onto Innovation supports customers with a worldwide sales and service organization. Additional information can be found at

About Inspectrology, LLC

Inspectrology, LLC, headquartered in Sudbury, MA, USA, has supplied optical metrology systems to the semiconductor, compound semiconductor, MEMS and LED industries with since 1983, formerly as IVS and Schlumberger. With offices in North America, Europe and Asia, and a large international installed base, Inspectrology, LLC has the global reach and expertise to support installations worldwide.

Forward-Looking Safe Harbor Statement

This press release contains certain forward-looking statements, as that term is defined in the Private Securities Litigation Reform Act of 1995, including those relating to the acquisitions described herein and to fiscal 2021 business performance and beyond and Onto Innovation’s plans for growth and improvement in profitability. You can identify these statements by the use of the words “may,” “will,” “could,” “should,” “would,” “plans,” “expects,” “anticipates,” “continue,” “estimate,” “project,” “intend,” “likely,” “forecast,” “probable,” “potential,” and similar expressions. These forward-looking statements involve risks and uncertainties that could cause actual results to differ materially from those projected or anticipated. Such risks and uncertainties include, but are not limited to, continued funding of defense programs, the timing and amounts of such funding, general economic and business conditions, including unforeseen weakness in Onto Innovation’s markets, effects of epidemics and pandemics such as COVID, effects of any U.S. federal government shutdown or extended continuing resolution, effects of continued geopolitical unrest and regional conflicts, competition, changes in technology and methods of marketing, delays in completing engineering and manufacturing programs, changes in customer order patterns, changes in product mix, continued success in technological advances and delivering technological innovations, changes in, or in the U.S. Government’s interpretation of, federal export control or procurement rules and regulations, market acceptance of Onto Innovation’s products, shortages in components, production delays or unanticipated expenses due to performance quality issues with outsourced components, inability to fully realize the expected benefits from acquisitions and restructurings, or delays in realizing such benefits, challenges in integrating acquired businesses and achieving anticipated synergies, increases in interest rates, changes to industrial security and cyber-security regulations and requirements, changes in tax rates or tax regulations, changes to interest rate swaps or other cash flow hedging arrangements, changes to generally accepted accounting principles, difficulties in retaining key employees and customers, unanticipated costs under fixed-price service and system integration engagements, and various other factors beyond our control. These risks and uncertainties also include such additional risk factors as are discussed in Onto Innovation’s filings with the U.S. Securities and Exchange Commission, including its Annual Report on Form 10-K for the fiscal year ended December 29, 2019. Onto Innovation cautions readers not to place undue reliance upon any such forward-looking statements, which speak only as of the date made. Onto Innovation undertakes no obligation to update any forward-looking statement to reflect events or circumstances after the date on which such statement is made.

Source: Onto Innovation Inc.

Michael Sheaffer, +1 978.253.6273
mike.sheaffer@ontoInnovation.comSource: Onto Innovation Inc.

Inspectrology LLC Introduces IVS 220 Optical Metrology Solution

for high productivity in 200mm Environments

Inspectrology LLC brings new technology to 200mm metrology with the new IVS 220 which features 165 wafer per hour throughput and sub 1nm precision.

Sudbury, MA — July 9, 2019 — Inspectrology LLC, a manufacturer of optical overlay and CD Metrology Systems, announced today the release of the new IVS 220 at Semicon West. Designed to meet today’s advanced metrology needs, a number of features have been added to the system to build on the solid reputation of the IVS series metrology systems.

"The IVS 220 will allow us to reduce our metrology cost of ownership while at the same time meet our ever-tightening process requirements." said David Andrews, Lithography Equipment Engineer at Analog Devices Wilmington Manufacturing. “Inspectrology’s IVS series optical metrology systems have been an integral part of our process for over 20 years and the addition of the IVS 220 will help us move to the next level.

The IVS 220 brings advanced technology to 75mm-200mm fabs who are pushing the boundaries of their processes.” added Neil Casa, Inspectrology LLC vice president of Engineering. "We have significantly improved throughput and tightened the precision. It was critical for us to maintain the MTBF that the IVS systems are legendary for while pushing performance limits".

About Inspectrology LLC
Inspectrology LLC Inc., headquartered in Sudbury, MA, USA, has supplied optical metrology systems to the semiconductor, compound semiconductor, MEMS and LED industries with since 1979, formerly as IVS and Schlumberger. With offices in North America, Europe and Asia, and a large international installed base, Inspectrology LLC has the global reach and expertise to support installations worldwide.

Contact: Paul C. Knutrud, Inspectrology LLC, +1 978-318-4041,

Inspectrology expands operations in Europe and Asia with representative agreements with Eumetrys of France and Excellis of Singapore

"Inspectrology Selected Eumetrys and Excellis for their expertise and unique skills and abilities to meet the needs of our customers and exceed their expectations"

Sudbury, MA - January 1, 2013—Inspectrology, a manufacturer of optical
overlay metrology systems has signed agreements with Excellis Pte Limited of
Singapore, and Eumetrys SAS, of France to represent Inspectrology in the
respective regions of Asia and Europe.
“It is great to be working with the team at Inspectrology.” said Martin Lau,
Managing Director of Excellis, "We have consolidated our stock in Singapore and
are already installing new equipment for a customer in Singapore. Our customers
are seeing the attention to service are now able to provide them."
Yannick Bedin, CEO of Eumetrys commented, "Our customers reported to
us they are very excited about the new support structure. The IVS tools have
always been great workhorse tools. I am sticking to my favorite way of running
business in the NANOworld: raising customer satisfaction every day! This is the
KEY for a successful future".
“Having acquired the rights to the IVS product line in September, it was
critical for our business to quickly scale to a world-wide service organization.
Working with the experienced engineers at Excellis and Eumetrys has allowed us
to ramp quickly and efficiently to meet our customer's needs.” said Paul Knutrud,
Vice President of Marketing and Finance at Inspectrology.
About Eumetrys
Eumetrys SAS, is headquartered in Gaillac, France, and created in November
2012 by Yannick Bedin, long time technical support manager for the IVS products.
Eumetrys was created to fill the need for European customer support for the IVS
system. Eumetrys will work closely with Inspectrology to continue to focus on
response time and customer satisfaction for the IVS product line in Europe. The
European region has important potential for expansion for the metrology
marketplace. Eumetrys is uniquely qualified to both support the existing loyal
customer base and to enable the expansion of the product line in Europe with a
focus on MEMS, Compound Semiconductor, LED, and high value semiconductor
systems at 200mm wafer sizes and below.
Contact: Yannick Bedin, Président of Eumetrys
Inspectrology LLC, 144 North Road Suite 1450, Sudbury, Massachusetts, USA
About Excellis
Excellis Pte Limited, Headquartered in Singapore, was established in 2007 with the
strategic intent to be a “service-arm company” representing small-and-medium
semiconductor equipment manufacturers in the world to operate in Asia. We
advocate the belief that this segment of SME companies should be further
leveraged by cost-sharing initiatives and win-win collaboration in order to bring in
their respective innovative products to this competitive industry.
Excellis business portfolio consists of Equipment Servicing, Used Equipment
Trading and distributor of semiconductor consumable parts. The staff in Excellis
has more than 2 decades experience servicing portfolios in the industry.
Contact: Martin Lau, Managing Director of Excellis,
About Inspectrology
Inspectrology LLC., headquartered in Sudbury, MA, USA, is the OEM for the IVS
Optical Metrology product line which has been in production since 1980, formerly
as Schlumberger Verification Systems. The IVS systems are known in the industry
for their longevity and robust performance in a production fab environment. With a
focus on MEMS, Compound Semiconductor, LED and other challenging
processes, the IVS system is uniquely positioned to meet the needs of fabs
running at 75-200mm wafer sizes.
With Support offices on both coasts in North America, as well as Europe and Asia
with the above additions, Inspectrology has the global reach and expertise to
support installations worldwide. The staff of Inspectrology has 29 years of
experience with the IVS products.
Contact: Paul Knutrud, Vice President of Marketing and Finance, Inspectrology
LLC +1.978.897.1775,

Inspec Wafer NIST Traceable Standard

Sudbury, MA, USA, October 7, 2013, Inspectrology introduces the IVS InspecTM 200mm NIST Traceable Standard Wafer. The wafer was designed from the ground up as a Metrology standard and daily control wafer. It is certified by Inspectrology tor be traceable to the NIST Standard Reference Material SRM 475 photomask. This wafer also comes with a complete IVS 100 series and IVS 200 series recipe for customers using the IVS platform.

There are a total of 20 features that are certified on the wafer with complete
documentation. Two pitch sizes are certified, a two micron and a six micron pitch at
five fields on the wafer in X and Y. The serial numbered wafer comes with a
certificate and a DVD with data summaries, full data for the wafer measured, and a
set of IVS recipes to calibrate your Metrology tool. This wafer is not limited to the
IVS platform and may be used on any equipment that accepts 200mm wafers.
This two layer wafer has one layer of Oxide on Silicon and a second layer of TiN to
provide overlay metrology control. A number of features beyond the certified values
are available including several sizes of CD and pitch as well as variations of overlay
targets. The wafer can also be used as a stage mapping artifact with marks spaced
in a 1mm step grid across the entire wafer.
Paul Knutrud, director of the Inspectrology Calibration Lab added, “We believe that
the IVS InspecTM is a valuable resource to our customers and allows control of the
IVS platform tools to even tighter tolerances than before by having a single defined
standard. All IVS 200 systems are sold with an InspecTM wafer as standard
About Inspectrology
Inspectrology, through the IVS platform, has provided state-of-the-art metrology
systems to the semiconductor industry for over 30 years. The IVS metrology system
has become synonymous with rock solid reliability in the industry with an installed
base of several hundred units in 17 countries.

Inspectrology, corporate sponsor for Hometown Team charity event to support Christopher’s Haven

Boston, MA, USA, January 4, 2015, Inspectrology was one of two corporate sponsors of fundraiser at the EMC Club at Fenway Park.

Over 200 people attended the cocktail party at EMC club at Fenway Park to support the work of Christopher’s Haven. The event was hosted by Boston Red Sox manager John Farrell and his wife Sue as well as actor Chris Evans of Captain America fame.
‘We are always looking for ways to give back to our community and this was a perfect opportunity to support the great work done at Christopher’s Haven.’ Said Paul Knutrud, VP of Marketing for Inspectrology.
Joyce Duval, Executive Director of Christopher’s Haven added ‘We thank Inspectrology for their support of Christopher’s Haven. This was a very successful event for us thanks in part to their sponsorship and participation by a large portion of their staff.’
About Christopher’s Haven
We are Christopher’s Haven.  We are a home for kids and their families while they battle cancer.  Our home is more than a place to stay, it’s a support system to help with things large and small, and a community where families can be together, share a laugh, be comforted, and comfort others.  Christopher’s Haven allows kids and families to focus their energies on beating the cancer that has attacked them all.
We know that medicine can heal the patient.  Christopher’s Haven helps heal the child.
About Inspectrology
Inspectrology, through the IVS platform, has provided state-of-the-art metrology systems to the semiconductor industry for over 30 years. The IVS metrology system has become synonymous with rock solid reliability in the industry with an installed base of several hundred units in 17 countries.
Paul Knutrud
Tel. 978-897-1775