Inspectrology News

News Releases from Inspectrology


Inspectrology LLC Introduces IVS 220 Optical Metrology Solution

for high productivity in 200mm Environments

Inspectrology LLC brings new technology to 200mm metrology with the new IVS 220 which features 165 wafer per hour throughput and sub 1nm precision.

Sudbury, MA — July 9, 2019 — Inspectrology LLC, a manufacturer of optical overlay and CD Metrology Systems, announced today the release of the new IVS 220 at Semicon West. Designed to meet today’s advanced metrology needs, a number of features have been added to the system to build on the solid reputation of the IVS series metrology systems.

"The IVS 220 will allow us to reduce our metrology cost of ownership while at the same time meet our ever-tightening process requirements." said David Andrews, Lithography Equipment Engineer at Analog Devices Wilmington Manufacturing. “Inspectrology’s IVS series optical metrology systems have been an integral part of our process for over 20 years and the addition of the IVS 220 will help us move to the next level.

The IVS 220 brings advanced technology to 75mm-200mm fabs who are pushing the boundaries of their processes.” added Neil Casa, Inspectrology LLC vice president of Engineering. "We have significantly improved throughput and tightened the precision. It was critical for us to maintain the MTBF that the IVS systems are legendary for while pushing performance limits".

About Inspectrology LLC
Inspectrology LLC Inc., headquartered in Sudbury, MA, USA, has supplied optical metrology systems to the semiconductor, compound semiconductor, MEMS and LED industries with since 1979, formerly as IVS and Schlumberger. With offices in North America, Europe and Asia, and a large international installed base, Inspectrology LLC has the global reach and expertise to support installations worldwide.

Contact: Paul C. Knutrud, Inspectrology LLC, +1 978-318-4041,

Inspectrology expands operations in Europe and Asia with representative agreements with Eumetrys of France and Excellis of Singapore

"Inspectrology Selected Eumetrys and Excellis for their expertise and unique skills and abilities to meet the needs of our customers and exceed their expectations"

Sudbury, MA - January 1, 2013—Inspectrology, a manufacturer of optical
overlay metrology systems has signed agreements with Excellis Pte Limited of
Singapore, and Eumetrys SAS, of France to represent Inspectrology in the
respective regions of Asia and Europe.
“It is great to be working with the team at Inspectrology.” said Martin Lau,
Managing Director of Excellis, "We have consolidated our stock in Singapore and
are already installing new equipment for a customer in Singapore. Our customers
are seeing the attention to service are now able to provide them."
Yannick Bedin, CEO of Eumetrys commented, "Our customers reported to
us they are very excited about the new support structure. The IVS tools have
always been great workhorse tools. I am sticking to my favorite way of running
business in the NANOworld: raising customer satisfaction every day! This is the
KEY for a successful future".
“Having acquired the rights to the IVS product line in September, it was
critical for our business to quickly scale to a world-wide service organization.
Working with the experienced engineers at Excellis and Eumetrys has allowed us
to ramp quickly and efficiently to meet our customer's needs.” said Paul Knutrud,
Vice President of Marketing and Finance at Inspectrology.
About Eumetrys
Eumetrys SAS, is headquartered in Gaillac, France, and created in November
2012 by Yannick Bedin, long time technical support manager for the IVS products.
Eumetrys was created to fill the need for European customer support for the IVS
system. Eumetrys will work closely with Inspectrology to continue to focus on
response time and customer satisfaction for the IVS product line in Europe. The
European region has important potential for expansion for the metrology
marketplace. Eumetrys is uniquely qualified to both support the existing loyal
customer base and to enable the expansion of the product line in Europe with a
focus on MEMS, Compound Semiconductor, LED, and high value semiconductor
systems at 200mm wafer sizes and below.
Contact: Yannick Bedin, Président of Eumetrys
Inspectrology LLC, 144 North Road Suite 1450, Sudbury, Massachusetts, USA
About Excellis
Excellis Pte Limited, Headquartered in Singapore, was established in 2007 with the
strategic intent to be a “service-arm company” representing small-and-medium
semiconductor equipment manufacturers in the world to operate in Asia. We
advocate the belief that this segment of SME companies should be further
leveraged by cost-sharing initiatives and win-win collaboration in order to bring in
their respective innovative products to this competitive industry.
Excellis business portfolio consists of Equipment Servicing, Used Equipment
Trading and distributor of semiconductor consumable parts. The staff in Excellis
has more than 2 decades experience servicing portfolios in the industry.
Contact: Martin Lau, Managing Director of Excellis,
About Inspectrology
Inspectrology LLC., headquartered in Sudbury, MA, USA, is the OEM for the IVS
Optical Metrology product line which has been in production since 1980, formerly
as Schlumberger Verification Systems. The IVS systems are known in the industry
for their longevity and robust performance in a production fab environment. With a
focus on MEMS, Compound Semiconductor, LED and other challenging
processes, the IVS system is uniquely positioned to meet the needs of fabs
running at 75-200mm wafer sizes.
With Support offices on both coasts in North America, as well as Europe and Asia
with the above additions, Inspectrology has the global reach and expertise to
support installations worldwide. The staff of Inspectrology has 29 years of
experience with the IVS products.
Contact: Paul Knutrud, Vice President of Marketing and Finance, Inspectrology
LLC +1.978.897.1775,

Inspec Wafer NIST Traceable Standard

Sudbury, MA, USA, October 7, 2013, Inspectrology introduces the IVS InspecTM 200mm NIST Traceable Standard Wafer. The wafer was designed from the ground up as a Metrology standard and daily control wafer. It is certified by Inspectrology tor be traceable to the NIST Standard Reference Material SRM 475 photomask. This wafer also comes with a complete IVS 100 series and IVS 200 series recipe for customers using the IVS platform.

There are a total of 20 features that are certified on the wafer with complete
documentation. Two pitch sizes are certified, a two micron and a six micron pitch at
five fields on the wafer in X and Y. The serial numbered wafer comes with a
certificate and a DVD with data summaries, full data for the wafer measured, and a
set of IVS recipes to calibrate your Metrology tool. This wafer is not limited to the
IVS platform and may be used on any equipment that accepts 200mm wafers.
This two layer wafer has one layer of Oxide on Silicon and a second layer of TiN to
provide overlay metrology control. A number of features beyond the certified values
are available including several sizes of CD and pitch as well as variations of overlay
targets. The wafer can also be used as a stage mapping artifact with marks spaced
in a 1mm step grid across the entire wafer.
Paul Knutrud, director of the Inspectrology Calibration Lab added, “We believe that
the IVS InspecTM is a valuable resource to our customers and allows control of the
IVS platform tools to even tighter tolerances than before by having a single defined
standard. All IVS 200 systems are sold with an InspecTM wafer as standard
About Inspectrology
Inspectrology, through the IVS platform, has provided state-of-the-art metrology
systems to the semiconductor industry for over 30 years. The IVS metrology system
has become synonymous with rock solid reliability in the industry with an installed
base of several hundred units in 17 countries.

Inspectrology, corporate sponsor for Hometown Team charity event to support Christopher’s Haven

Boston, MA, USA, January 4, 2015, Inspectrology was one of two corporate sponsors of fundraiser at the EMC Club at Fenway Park.

Over 200 people attended the cocktail party at EMC club at Fenway Park to support the work of Christopher’s Haven. The event was hosted by Boston Red Sox manager John Farrell and his wife Sue as well as actor Chris Evans of Captain America fame.
‘We are always looking for ways to give back to our community and this was a perfect opportunity to support the great work done at Christopher’s Haven.’ Said Paul Knutrud, VP of Marketing for Inspectrology.
Joyce Duval, Executive Director of Christopher’s Haven added ‘We thank Inspectrology for their support of Christopher’s Haven. This was a very successful event for us thanks in part to their sponsorship and participation by a large portion of their staff.’
About Christopher’s Haven
We are Christopher’s Haven.  We are a home for kids and their families while they battle cancer.  Our home is more than a place to stay, it’s a support system to help with things large and small, and a community where families can be together, share a laugh, be comforted, and comfort others.  Christopher’s Haven allows kids and families to focus their energies on beating the cancer that has attacked them all.
We know that medicine can heal the patient.  Christopher’s Haven helps heal the child.
About Inspectrology
Inspectrology, through the IVS platform, has provided state-of-the-art metrology systems to the semiconductor industry for over 30 years. The IVS metrology system has become synonymous with rock solid reliability in the industry with an installed base of several hundred units in 17 countries.
Paul Knutrud
Tel. 978-897-1775