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Products

Inspectrology is the leading supplier of CD and Overlay metrology systems for 200mm fabs.

The IVS 220 is unrivaled in precision, throughput and reliability with built in flexibility setting a new standard for 200mm metrology. Inspectrology has systems for all fabs needs and budgets including re-manufactured systems.

Service

Inspectrology provides unparalleled service and support.

The IVS product line is known as one of the most robust metrology tools in the industry. When there is a problem, it is good to know you have the most responsive team available behind you. With decades of expertise, our service engineers get the job done right.

 

Onto Innovation Adds Overlay Metrology Capability with the Acquisition of Inspectrology, LLC

. Expands position in the high growth compound semiconductor market driven by higher content in 5G RF and electric vehiclesrnrn. Onto Innovation’s Advanced Process Control (APC) software and Dragonfly® System are expected to provide revenue synergies when combined with Inspectrology products

 

Inspectrology LLC Introduces IVS 220 Optical Metrology Solution

for high productivity in 200mm Environments

Inspectrology LLC brings new technology to 200mm metrology with the new IVS 220 which features 165 wafer per hour throughput and sub 1nm precision.

 

Inspectrology expands operations in Europe and Asia with representative agreements with Eumetrys of France and Excellis of Singapore

"Inspectrology Selected Eumetrys and Excellis for their expertise and unique skills and abilities to meet the needs of our customers and exceed their expectations"

 

Inspec Wafer NIST Traceable Standard

Sudbury, MA, USA, October 7, 2013, Inspectrology introduces the IVS InspecTM 200mm NIST Traceable Standard Wafer. The wafer was designed from the ground up as a Metrology standard and daily control wafer. It is certified by Inspectrology tor be traceable to the NIST Standard Reference Material SRM 475 photomask. This wafer also comes with a complete IVS 100 series and IVS 200 series recipe for customers using the IVS platform.

 

Inspectrology, corporate sponsor for Hometown Team charity event to support Christopher’s Haven

Boston, MA, USA, January 4, 2015, Inspectrology was one of two corporate sponsors of fundraiser at the EMC Club at Fenway Park.